References

Nanopositioning and Nanomeasuring Machine NPMM-200

NPMM-200 I and NPMM-200 II

Nanopositioning and Nanomeasuring Machine NPMM-200

  • Team leadership prototype development NPMM-200 I (2012 - 2015 transfer project & joint project)
  • Project management, team lead-up and delivery NPMM-200 II for the ITO Nano Lab Stuttgart (2015 - 2018 large equipment initiative of the DFG)

The NPMM-200 unites the most important results of the Collaborative Research Centre 622 "Nanopositioning and Nanomeasuring Machines", in which more than 10 disciplines and affiliated institutes of the TU Ilmenau have participated. It is currently one of the most accurate measuring machines available.

  • Measuring and positioning range: 200 mm x 200 mm x 25 mm
  • Positioning reproducibility: ≤4 nm over the entire positioning range
  • Resolution: ≤80 pm over the entire positioning range

publications:

G. Jäger, E. Manske, T. Hausotte, A. Müller and F. Balzer: Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology; IOP Publishing; Surface Topography: Metrology and Properties, Volume 4, Number 3; 2016

E Manske, G Jäger, T Hausotte, A. Müller and F. Balzer: Nanopositioning and Nanomeasuring Machine NPMM-200 – sub-nanometre resolu-tion and highest accuracy in extended macroscopic working areas; euspen’s 17th International Conference & Exhibition, Hannover, DE, May 2017