References

Micro coordinate measuring machine »Nanopositioning and Nanomeasuring Machine NPMM-200«

NPMM-200 I & NPMM-200 II

Nanopositioning and Nanomeasuring Machine NPMM-200 | micro coordinate measuring machine

  • Team leadership prototype development NPMM-200 I (2012 - 2015 transfer project & joint project)
  • Project management & team lead-up of construction till delivery of NPMM-200 II for the ITO Nano Lab Stuttgart (2015 - 2018 large equipment initiative of the DFG)

The NPMM-200 unites the most important results of the Collaborative Research Centre 622 "Nanopositionier- und Nanomessmaschinen", in which more than 10 disciplines as well as affiliated institutes of the TU Ilmenau have participated. The NPMM-200 is currently one of the most accurate measuring machines available.

  • Measuring & positioning range: 200 mm x 200 mm x 25 mm
  • Positioning reproducibility: ≤4 nm
  • Resolution: ≤80 pm

publications:

G. Jäger, E. Manske, T. Hausotte, A. Müller, F. Balzer: Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology; IOP Publishing; Surface Topography: Metrology and Properties, Volume 4, Number 3; 2016

E Manske, G Jäger, T Hausotte, A. Müller, F. Balzer: Nanopositioning and Nanomeasuring Machine NPMM-200 – sub-nanometre resolu-tion and highest accuracy in extended macroscopic working areas; euspen’s 17th International Conference & Exhibition, Hannover, DE, May 2017