References

Interferometric Nanoprofiler

INP

Development of the Interferometric Nanoprofiler, a precision device for measuring the shape deviation of plane mirrors:

  • Conception
  • Design and construction
  • Qualification of the measuring principle, reduction of the uncertainty of the measurement of the shape deviation

Publicatios:

A. Müller, N. Hofmann and E. Manske: "Approaching nanometre accuracy in measurement of the profile deviation of a large plane mirror" Measurement Science and Technology, Volume 23, Number 7, 2012 IOP Publishing

A. Müller; G. Jäger; E. Manske: Interferometric measurement of profile deviations of large precision mirrors; Proc. SPIE 8082-80821N, 2011

A. Müller, H. Büchner, G. Jäger, E. Manske: Patent: Verfahren und Vorrichtung zur Messung von Profilabweichungen, Patent DE10019059A1, 2008

Müller, A.: Entwicklung eines Präzisionsgerätes zur Messung der Gestaltabweichung von Planspiegeln, ISLE, 2006, Taschenbuch
ISBN: 3932633903