Three-Flat Test

Establishment of a flatness reference for the calibration of the plane mirrors of the Nanopositioning and Nanomeasuring Machines

    The metrological performance of the Nanopositioning and Nanomeasuring Machine depends to a large extent on the precision of the standard mirror corner. In order to determine the shape deviations of the surfaces of the standard mirror corner, various configurations of three-flat tests were applied and analysed. Above all, it was necessary to increase the stability and reproducibility of the measuring system and the measuring principle, as well as to gain knowledge about deformations due to mount and weight on optically effective surfaces and to correct them as far as possible.

    • Implementation of several basic models of the three-flat test
    • Development of the modified adaptive three-flat test for the vertical arrangement
    • Uncertainty analysis and budget
    • Measurement data transfer and referencing


    Xu, H.; Müller, A.; Balzer, F.; Percle, B.; Manske, Eberhard; Jäger, Gerd: The complete acquisition of the topography of a special multi-mirror arrangement with the help of a Fizeau interferometer. - In: Conference (Munich): 2009.06.15-18. - Bellingham, Wash. : SPIE (2009)