Weight Force Compensation Units

for the Nanopositioning and Nanomeasuring Machine

    The weight force compensation units of the nanopositioning and nano-measuring machine NPMM-200 enable a loss-free compensation of the weight of the measuring table with measuring objects of different masses in a vacuum. The development included:

    • Conception and simulation
    • Design, contract manufacturing and construction
    • Measurement, analysis and optimization of the weight compensation units