The weight force compensation units of the nanopositioning and nano-measuring machine NPMM-200 enable a loss-free compensation of the weight of the measuring table with measuring objects of different masses in a vacuum. The development included:

• Conception and simulation
• Design, contract manufacturing and construction
• Measurement, analysis and optimization of the weight compensation units

publications:

Also see Nanopositioning and Nanomeasuring Machine NPMM-200